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AUGER AND X-RAY CHARACTERIZATION OF SURFACE NITRIDE FILMS ON TI, ZR, AND HF.
Journal Articles
Overview
Identity
Additional Document Info
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Overview
authors
Dawson, Peter Thomas
STAZYK, SAJ
status
published
publication date
January 1, 1982
published in
Journal of Vacuum Science and Technology
Journal
Identity
Digital Object Identifier (DOI)
10.1116/1.571732
Additional Document Info
start page
36
end page
41
volume
V 21
issue
N 1