Maskless Patterning of Metal Outflow in Alternating Metal/Ceramic Multiple Nanolayers by Femtosecond Laser Irradiation

In this work, solid-state metal transport from internal metal nanolayers onto the surface of metal/ceramic nanomultilayers (NMLs) has been directed in a controlled way by femtosecond (fs) laser irradiation and subsequent low-temperature thermal annealing. Laser-irradiation-induced modifications of the NML microstructures and stress states can be limited within the first few top nanolayers due to the focused laser energy input at the …