Photoluminescence of silicon carbonitride thin films: The interdependence of post-deposition annealing and growth temperature

Silicon carbonitride (SiCN) thin films have recently emerged as the promising class of multifunctional materials because of their unique properties inherited from binary submatrices of silicon carbide, silicon nitride, and carbonitride. The luminescence mechanism of such ternary materials is complex and is influenced by slight changes in the film composition, deposition temperature, and post-deposition annealing temperature. This paper reports …