Focused ion beam nano-structuring of $Al_2O_3$ dielectric layers for photonic applications Academic Article uri icon

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authors

  • Ay, Feridun
  • Bradley, Jonathan
  • Hopman, Wico
  • Gadgil, Vishwas
  • M, Ridder
  • Worhoff, Kerstin
  • Pollnau, Markus