authors Lewis, Ryan Mackenzie, James A Tiedje, Thomas Beaton, Daniel A Masnadi-Shirazi, Mostafa Bahrami-Yekta, Vahid Watkins, Keelan P Mooney, Patricia M
has subject area 0401 Atmospheric Sciences (FoR) 0901 Aerospace Engineering (FoR) 0912 Materials Engineering (FoR) Applied Physics (Science Metrix)
published in Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Journal
keywords Engineering Engineering, Electrical & Electronic GAAS Nanoscience & Nanotechnology Physical Sciences Physics Physics, Applied Science & Technology Science & Technology - Other Topics Technology