Journal article
A metallurgical route to upgrade silicon kerf derived from diamond-wire slicing process
Abstract
Authors
Huang L; Danaei A; Fang M; Thomas S; Luo X; Barati M
Journal
Vacuum, Vol. 163, , pp. 164–171
Publisher
Elsevier
Publication Date
May 1, 2019
DOI
10.1016/j.vacuum.2019.02.019
ISSN
0042-207X