Direct bonding of titanium layers on silicon Academic Article uri icon

  •  
  • Overview
  •  
  • Research
  •  
  • Identity
  •  
  • Additional Document Info
  •  
  • View All
  •  

authors

  • Baudin, F
  • Di Cioccio, L
  • Delaye, V
  • Chevalier, N
  • Dechamp, J
  • Moriceau, H
  • Martinez, E
  • Brechet, Yves

publication date

  • May 2013