Direct bonding of titanium layers on silicon Journal Articles

authors

• Baudin, F
• Di Cioccio, L
• Delaye, V
• Chevalier, N
• Dechamp, J
• Moriceau, H
• Martinez, E
• Brechet, Yves

status

• published 

publication date

• May 2013

has subject area

• 1005 Communications Technologies (FoR)
• 1007 Nanotechnology (FoR)
• Mechanical Engineering & Transports (Science Metrix)
• Nanoscience & Nanotechnology (Science Metrix)

published in

• Microsystem Technologies  Journal

keywords

• Engineering
• Engineering, Electrical & Electronic
• Materials Science
• Materials Science, Multidisciplinary
• Nanoscience & Nanotechnology
• Physical Sciences
• Physics
• Physics, Applied
• Science & Technology
• Science & Technology - Other Topics
• Technology

Digital Object Identifier (DOI)

• 10.1007/s00542-012-1664-0

start page

• 647

end page

• 653

volume

• 19

issue

• 5