Subwavelength Grating Structures in Silicon‐on‐Insulator Waveguides

First implementations of subwavelength gratings (SWGs) in silicon‐on‐insulator (SOI) waveguides are discussed and demonstrated by experiment and simulations. The subwavelength effect is exploited for making antireflective and highly reflective waveguide facets as well as efficient fiber‐chip coupling structures. We demonstrate experimentally that by etching triangular SWGs into SOI waveguide facets, the facet power reflectivity can be reduced …