Journal article
Repeated Removal of Thin Layers of Silicon by Anodic Oxidation
Authors
Barber HD; Lo HB; Jones JE
Journal
Journal of The Electrochemical Society, Vol. 123, No. 9, pp. 1404–1409
Publisher
The Electrochemical Society
Publication Date
September 1, 1976
DOI
10.1149/1.2133085
ISSN
0013-4651