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Repeated Removal of Thin Layers of Silicon by...
Journal article

Repeated Removal of Thin Layers of Silicon by Anodic Oxidation

Authors

Barber HD; Lo HB; Jones JE

Journal

Journal of The Electrochemical Society, Vol. 123, No. 9, pp. 1404–1409

Publisher

The Electrochemical Society

Publication Date

September 1, 1976

DOI

10.1149/1.2133085

ISSN

0013-4651