Performance enhancement of an air-coupled multiple moving membrane capacitive micromachined ultrasonic transducer using an optimized middle plate configuration Journal Articles
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Overview
status
publication date
- December 20, 2016
has subject area
- 0205 Optical Physics (FoR)
- 0906 Electrical and Electronic Engineering (FoR)
- Nanoscience & Nanotechnology (Science Metrix)