has subject area 0204 Condensed Matter Physics (FoR) 0306 Physical Chemistry (incl. Structural) (FoR)
keywords BAND-GAP CHEMICAL-VAPOR-DEPOSITION CONSTANTS DIOXIDE GLOW-DISCHARGE METHANE Materials Science Materials Science, Multidisciplinary NANOSTRUCTURES NITRIDE OPTICAL-PROPERTIES PLASMA Physical Sciences Physics Physics, Applied Science & Technology Technology