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Selective area epitaxy of AlGaN nanowire arrays...
Journal article

Selective area epitaxy of AlGaN nanowire arrays across nearly the entire compositional range for deep ultraviolet photonics.

Abstract

Semiconductor light sources operating in the ultraviolet (UV)-C band (100-280 nm) are in demand for a broad range of applications but suffer from extremely low efficiency. AlGaN nanowire photonic crystals promise to break the efficiency bottleneck of deep UV photonics. We report, for the first time, site-controlled epitaxy of AlGaN nanowire arrays with Al incorporation controllably varied across nearly the entire compositional range. It is also …

Authors

Liu X; Le BH; Woo SY; Zhao S; Pofelski A; Botton GA; Mi Z

Journal

Optics Express, Vol. 25, No. 24, pp. 30494–30502

Publisher

Optica Publishing Group

Publication Date

November 27, 2017

DOI

10.1364/oe.25.030494

ISSN

1094-4087