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CMOS-compatible optical rib waveguides defined by...
Journal article

CMOS-compatible optical rib waveguides defined by local oxidation of silicon

Authors

Rowe LK; Elsey M; Tarr NG; Knights AP; Post E

Journal

Electronics Letters, Vol. 43, No. 7, pp. 392–393

Publisher

Institution of Engineering and Technology (IET)

Publication Date

March 29, 2007

DOI

10.1049/el:20073680

ISSN

0013-5194