Novel photoresist design based on electrophilic aromatic substitution Academic Article uri icon

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authors

  • Reck, B
  • Allen, RD
  • Twieg, RJ
  • Willson, CG
  • Matuszczak, S
  • Stover, Harald
  • Li, NH
  • Fréchet, JMJ

publication date

  • August 1989