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NONSWELLING NEGATIVE RESISTS INCORPORATING CHEMICAL AMPLIFICATION - THE ELECTROPHILIC AROMATIC-SUBSTITUTION APPROACH
Journal Articles
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Research
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Overview
authors
FRECHET, JMJ
MATUSZCZAK, S
Stover, Harald
WILLSON, CG
RECK, B
status
published
publication date
January 1, 1989
published in
ACS Symposium Series
Journal
Research
keywords
Chemistry
Chemistry, Multidisciplinary
Physical Sciences
Science & Technology
Additional Document Info
start page
74
end page
85
volume
412