authors Mercier, David Mandrillon, Vincent Parry, Guillaume Verdier, Marc Estevez, Rafael Brechet, Yves Maindron, Tony
has subject area 02 Physical Sciences (FoR) 09 Engineering (FoR) 10 Technology (FoR) Applied Physics (Science Metrix)
keywords ALD alumina BRITTLE COATINGS COATED SYSTEMS Cracks DEPOSITED ALUMINA Finite element modeling Fracture strength HARD ELASTIC FILMS INDENTATION RESPONSE LOW-TEMPERATURE Materials Science Materials Science, Coatings & Films Materials Science, Multidisciplinary NUMERICAL-ANALYSIS Nanoindentation OXIDE PLASTIC ZONE Physical Sciences Physics Physics, Applied Physics, Condensed Matter Pop-in STRESSES Science & Technology Technology Thin hard film Weibull statistical analysis