Development, quantitative performance and applications of a parallel electron energy‐loss spectrum imaging system

The development of a parallel electron energy‐loss spectrum imaging system is presented. The analytical performance of the imaging technique was investigated and the system applied to materials science problems. The system, which allows acquisition and storage of a parallel electron energy‐loss spectrum at each pixel of an image, was developed by interfacing a multichannel analyser and a microscope to a computer workstation. In the experimental …