Development, quantitative performance and applications of a parallel electron energy‐loss spectrum imaging system

The development of a parallel electron energy‐loss spectrum imaging system is presented. The analytical performance of the imaging technique was investigated and the system applied to materials science problems. The system, which allows acquisition and storage of a parallel electron energy‐loss spectrum at each pixel of an image, was developed by interfacing a multichannel analyser and a microscope to a computer workstation. In the experimental conditions used for imaging, detection limits and quantification errors were large and varied as a function of spatial resolution and the range of chemical elements of interest in the image. Applications of this imaging technique in materials science showed that quantitative chemical information is provided by the system and that the use of relative thickness maps and detailed statistical analysis of the spectrum‐image allowed an unbiased interpretation of the images. As energy‐loss spectra are available after processing, spectroscopic information about the analysed material can be used to provide supplementary information.