authors Fox-Rabinovich, GS Yamamoto, K Kovalev, AI Veldhuis, Stephen Clarence Ning, L Shuster, LS Elfizy, A
has subject area 0204 Condensed Matter Physics (FoR) 0306 Physical Chemistry (incl. Structural) (FoR) 0912 Materials Engineering (FoR) Applied Physics (Science Metrix)
keywords ATOMIC LAYER DEPOSITION COMBINED CATHODIC ARC DIELECTRIC-PROPERTIES FILMS Materials Science Materials Science, Coatings & Films NITRIDE PVD COATINGS PVD coating Physical Sciences Physics Physics, Applied SPUTTER-DEPOSITION SUPERLATTICE Science & Technology TIN/NBN TIN/TAN Technology high performance machining nano-multilayered coatings wear resistance