Scattering detection using a photonic‐microfluidic integrated device with on‐chip collection capabilities
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abstract
SU‐8‐based photonic‐microfluidic integrated devices with on‐chip beam shaping and collection capabilities were demonstrated in a scattering detection and counting application. Through the proper deployment of the tailored beam geometries via the on‐chip excitation optics, excellent CV values were measured for 1, 2, and 5 μm blank beads, 16.4, 11.0, and 12.5%, respectively, coupled with a simple free‐space optical detection scheme. The performance of these devices was found dependent on the combination of on‐chip, lens‐shaped beam geometry and bead size. While very low CVs were obtained when the combination was ideal, a nonideal combination could still result in acceptable CVs for flow cytometry; the reliability was confirmed via devices being able to resolve separate populations of 2.0 and 5.0 μm beads from their mixture with low CV values of 15.9 and 18.5%, respectively. On‐chip collection using integrated on‐chip optical waveguides was shown to be very reliable in comparison with a free‐space collection scheme, yielding a coincident rate of 94.2%. A CV as low as 19.2% was obtained from the on‐chip excitation and collection of 5 μm beads when the on‐chip lens‐shaped beam had a 6.0‐μm beam waist.
