The effect of substrate temperature on the isolation of n-type GaAs layers using MeV boron implantation
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Overview
status
publication date
- March 1, 2001
has subject area
- 0204 Condensed Matter Physics (FoR)
- 0906 Electrical and Electronic Engineering (FoR)
- 0912 Materials Engineering (FoR)
- Applied Physics (Science Metrix)