has subject area 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR) 0402 Geochemistry (FoR) 0915 Interdisciplinary Engineering (FoR) Applied Physics (Science Metrix)
published in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms Journal
keywords BEAMS DEFECTS DIFFUSION Instruments & Instrumentation Nuclear Science & Technology Physical Sciences Physics Physics, Atomic, Molecular & Chemical Physics, Nuclear Science & Technology Technology boron ion implantation positron annihilation vacancies