Single-crystal silicon high-Q torsional oscillators Journal Articles uri icon

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abstract

  • We describe techniques for constructing single-crystal silicon high-Q torsional oscillators. The oscillators are fabricated by the high-precision micromachining of silicon using orientation-dependent etches. We describe methods for using these oscillators as very powerful probes of the mechanical properties of a variety of physical systems.

publication date

  • November 1, 1985