Flexure Parallel Mechanism: Configuration and Performance Improvement of a Compact Acceleration Sensor

This research presents a tridimensional acceleration sensor based on flexure parallel mechanism (FPM). Three perpendicular compliant limbs with compact monolithic structure are developed to serve as the elastic component for acquiring the inertial signals in each direction. With integrated flexure hinges, each chain containing multiple revolute joints and cantilever beams are designed to carry compressive and tensile loads. First, the structure …