Spatially correlated erbium and Si nanocrystals in coimplanted SiO2 after a single high temperature anneal

We present a study of silicon (Si) and erbium (Er) coimplanted silica (SiO2) in which we observe, by combining high resolution scanning transmission electron microscopy and selective electron energy loss spectroscopy (EELS), a high spatial correlation between silicon nanocrystals (Si-NCs), Er, and oxygen (O) after a single high temperature (1100 °C) anneal. The observation of a spatial overlap of the EELS chemical maps of dark field (DF) images …