Journal article
Transmission and scanning electron microscopy studies of single femtosecond- laser-pulse ablation of silicon
Abstract
Abstract. The final state of the material resulting from laser irradiation of silicon using 130 fs pulses at 790 nm was studied using a number of techniques including scanning and transmission electron microscopies, as well as atomic force microscopy. Structural details and the level of damage to the nearby solid following irradiation were characterized and are discussed in the context of recent dynamical studies.
Authors
Borowiec A; MacKenzie M; Weatherly GC; Haugen HK
Journal
Applied Physics A, Vol. 76, No. 2, pp. 201–207
Publisher
Springer Nature
Publication Date
2 2003
DOI
10.1007/s003390201409
ISSN
0947-8396