X-ray emission from femtosecond laser micromachining

Abstract. We characterize the spectral properties of X-rays generated from selected metal and semiconductor targets when 120-fs laser pulses are focused to intensities of∼1014–3×1015 W/cm2 during laser micromachining in air. High fluxes of multi-keV-energy X-rays could be obtained with 280-μJ pulses at a 1 kHz repetition rate. The yield and spectral composition of the X-rays are found to depend sensitively on the processing conditions, and thus the X-ray emission is expected to be a novel indicator of optimal laser machining.