Modelling of NobleGas-SiH4Gas Mixture Glow Discharge Positive Column Plasmas Conference Paper uri icon

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authors

  • Chang, Jen-Shih
  • Kikuchi, Mitsuru
  • Berezin, Alexander
  • Hobson, Robert M
  • Matsumura, Shosaku
  • Teii, Shinriki

publication date

  • July 30, 1994