Single-etch subwavelength engineered fiber-chip grating couplers for 13 µm datacom wavelength band Journal Articles uri icon

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  • We report, for the first time, on the design and experimental demonstration of fiber-chip surface grating couplers based on subwavelength grating engineered nanostructure operating in the low fiber chromatic dispersion window (around 1.3 μm wavelengths), which is of great interest for short-reach data communication applications. Our coupler designs meet the minimum feature size requirements of large-volume deep-ultraviolet stepper lithography processes. The fiber-chip couplers are implemented in a standard 220-nm-thick silicon-on-insulator (SOI) platform and are fabricated by using a single etch process. Several types of couplers are presented, specifically the uniform, the apodized, and the focusing designs. The measured peak coupling efficiency is -2.5 dB (56%) near the central wavelength of 1.3 μm. In addition, by utilizing the technique of the backside substrate metallization underneath the grating couplers, the coupling efficiency of up to -0.5 dB (89%) is predicted by Finite Difference Time Domain (FDTD) calculations.


  • Benedikovic, Daniel
  • Alonso-Ramos, Carlos
  • Cheben, Pavel
  • Schmid, Jens H
  • Wang, Shurui
  • Halir, Robert
  • Ortega-Moñux, Alejandro
  • Xu, Dan-Xia
  • Vivien, Laurent
  • Lapointe, Jean
  • Janz, Siegfried
  • Dado, Milan

publication date

  • June 13, 2016