Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding Journal Articles uri icon

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  • We present several fundamental photonic building blocks based on suspended silicon waveguides supported by a lateral cladding comprising subwavelength grating metamaterial. We discuss the design, fabrication, and characterization of waveguide bends, multimode interference devices and Mach-Zehnder interferometers for the 3715 - 3800 nm wavelength range, demonstrated for the first time in this platform. The waveguide propagation loss of 0.82 dB/cm is reported, some of the lowest loss yet achieved in silicon waveguides for this wavelength range. These results establish a direct path to ultimately extending the operational wavelength range of silicon wire waveguides to the entire transparency window of silicon.


  • Penades, J Soler
  • Ortega-Moñux, A
  • Nedeljkovic, M
  • Wangüemert-Pérez, JG
  • Halir, R
  • Khokhar, AZ
  • Alonso-Ramos, C
  • Qu, Z
  • Molina-Fernández, I
  • Cheben, Pavel
  • Mashanovich, GZ

publication date

  • October 3, 2016