Journal article
Hot-carrier effects on the scattering parameters of lightly doped drain n-type metal–oxide–semiconductor field effect transistors
Abstract
The latest evolution in complementary metal–oxide–semiconductor technology has made the metal–oxide–semiconductor field effect transistor (MOSFET) a viable choice for rf applications, especially for frequencies in the low GHz region. However, hot-carrier effects should also be considered carefully when the devices are operating in the GHz regime. Here, we studied the effects of dc hot-carrier stress on lightly doped drain (LDD) n-type MOSFET …
Authors
Kwan WS; Deen MJ
Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, Vol. 16, No. 2, pp. 628–632
Publisher
American Vacuum Society
Publication Date
March 1, 1998
DOI
10.1116/1.589873
ISSN
2166-2746