Accurate Modeling and Parameter Extraction for Meander-Line N-Well Resistors

Accurate modeling and efficient parameter extraction of a scalable lumped-element model for n-well meander-line resistors that are suitable for radio frequency integrated circuit (RF IC) applications is presented. The equivalent circuit is similar to the spiral inductor model but with modifications to the element equations. Direct extraction of component values is performed by analysis of measured $Y$-parameters. The extracted results of the component values are physically meaningful and match those calculated using the scalable lumped-element model equations. The simulated $S$-parameter data from the equivalent lumped-element model shows very good agreement with the measured data up to 20 GHz.