The effect of the deposition rate on the properties of d.c.-magnetron-sputtered niobium nitride thin films
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Overview
status
publication date
- September 1987
has subject area
- 02 Physical Sciences (FoR)
- 09 Engineering (FoR)
- 10 Technology (FoR)
- Applied Physics (Science Metrix)
published in
- Thin Solid Films Journal