Journal article
Femtosecond laser irradiation of metal and thermal oxide layers on silicon: studies utilising cross-sectional transmission electron microscopy
Abstract
We present the results of 800 and 400 nm wavelength, femtosecond laser pulse irradiation of a sample consisting of a metal film on thermally-grown oxide on silicon. On selected sites, cross-sectional transmission electron microscopy was performed to provide information on sub-surface changes not observable with surface scanning electron microscopy. A range of pulse energies in single-pulse irradiation exists for which the metal film was removed …
Authors
Crawford THR; Yamanaka J; Hsu EM; Botton GA; Haugen HK
Journal
Applied Physics A, Vol. 91, No. 3, pp. 473–478
Publisher
Springer Nature
Publication Date
6 2008
DOI
10.1007/s00339-008-4433-2
ISSN
0947-8396