The influence of carbon on the structure and photoluminescence of amorphous silicon carbonitride thin films

Silicon carbonitride (SiCN), an intermediate structure between silicon carbide and silicon nitride, has emerged as a material of interest to increase the performance of silicon-based visible luminescence. In this work, thin films of SiCN were deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition using silane, nitrogen, and methane as the gas precursors. The microstructure, composition, and optical properties of the …