Void formation at silicon nitride/silicon interfaces studied by variable-energy positrons Academic Article uri icon

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authors

  • Halec, Andrzej
  • Schultz, Peter J
  • Boudreau, Marcel
  • Boumerzoug, Mohamed
  • Mascher, Peter
  • McCaffrey, John P
  • Jackman, TE

publication date

  • December 1994