X-ray-diffraction study of crystalline Si nanocluster formation in annealed silicon-rich silicon oxides Academic Article uri icon

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authors

  • Comedi, D
  • Zalloum, OHY
  • Irving, EA
  • Wojcik, J
  • Roschuk, T
  • Flynn, MJ
  • Mascher, Peter

publication date

  • January 15, 2006