Influence of the annealing temperature and silicon concentration on the absorption and emission properties of Si nanocrystals

Silicon nanocrystals embedded in a silicon-rich silicon-oxide matrix have been fabricated at different silicon contents (38%, 40%, and 49%) using plasma-enhanced chemical vapor deposition and annealing at different temperatures in the range from 900 °C to 1100 °C. Their optical properties have been investigated by photoluminescence and transmittance measurements. Strong, room-temperature emission bands at ∼1.6 eV have been observed for all samples, with intensities dependent on the annealing temperature and Si content of the samples. From transmittance measurements, a redshift of the absorption edge has been detected when increasing the annealing temperature or Si content.

Influence of the annealing temperature and silicon concentration on the absorption and emission properties of Si nanocrystals Journal Articles