Spectroscopic strain measurement methodology: Degree-of-polarization photoluminescence versus photocurrent spectroscopy

A methodological approach to strain analysis in semiconductor devices is presented. Two methods, degree-of-polarization of photoluminescence and photocurrent spectroscopy, are compared by analyzing a spatially inhomogeneous strained test sample, namely, a high-power diode laser array that is affected by packaging-induced stress. Both methods concordantly reveal a −0.1% uniaxial compression in the vicinity of the midpoint of the active region of …