Coverage of rough substrates by ZnS using vacuum evaporation and atomic layer epitaxy

The effects of various deposition techniques on the growth of ZnS thin films on a sintered BaTiO3-based complex perovskite substrate, using the scanning electron microscope have been studied. The results clearly show a non-uniform and incomplete coverage of the sub strate in the case of films grown by electron-beam evaporation and resistance-heated evaporation. A shadowing effect is observed in these films. Increase in the thickness of the …