Preparation and characterization of thin films of MgO, Al2O3 and MgAl2O4 by atomic layer deposition
Journal Articles
- Overview
- Research
- Identity
- Additional Document Info
- View All
Overview
status
publication date
- February 1993
has subject area
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
- 0906 Electrical and Electronic Engineering (FoR)
- 1099 Other Technology (FoR)
- Applied Physics (Science Metrix)
published in
- Journal of Electronic Materials Journal