Conditions for high yield of selective-area epitaxy InAs nanowires on SiOx/Si(111) substrates Academic Article uri icon

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abstract

  • Experimental data and a model are presented which define the boundary values of V/III flux ratio and growth temperature for droplet-assisted nucleation of InAs semiconductor nanowires in selective-area epitaxy on SiO(x)/Si (111) substrates by molecular beam epitaxy. Within these boundaries, the substrate receives a balanced flux of group III and V materials allowing the growth of vertically oriented nanowires as compared to the formation of droplets or crystallites.

publication date

  • November 20, 2015