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ECR plasma deposition of dielectric films for optoelectronic applications
Grant
Overview
Affiliation
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Overview
date/time interval
April 1, 1991 - March 31, 1994
awarded by
Natural Sciences and Engineering Research Council
total award amount
CAD 203160
Affiliation
contributor
Jessop, Paul Edward
Funded by
Mascher, Peter
Funded by
Simmons, John
Funded by