Prospective technology for system-on-a-chip: N 2 implant followed by VHP O 2 reoxidation Conferences uri icon

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authors

  • Luo, Tien-Ying
  • Al-Shareef, Husam N
  • Brown, George A
  • Watt, Victor HC
  • Karamcheti, Arun
  • Jackson, Mike D
  • Huff, Howard R
  • Evans, Ben
  • Lee, Chongmok
  • Luan, Hong-Fa
  • Kwong, Dim-Lee

publication date

  • August 18, 2000