Optimum reactive ion etching ofx-cut quartz using SF₆and Ar Conferences

authors

• Minnick, Matthew
• Devenyi, GA
• Kleiman, Rafael

status

• published 

publication date

• November 1, 2013

has subject area

• 09 Engineering (FoR)
• 10 Technology (FoR)
• Nanoscience & Nanotechnology (Science Metrix)

published in

• Journal of Micromechanics and Microengineering  Journal

presented at event

• 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)  Conference

keywords

• Engineering
• Engineering, Electrical & Electronic
• Instruments & Instrumentation
• Nanoscience & Nanotechnology
• Physical Sciences
• Physics
• Physics, Applied
• Science & Technology
• Science & Technology - Other Topics
• Technology

Digital Object Identifier (DOI)

• 10.1088/0960-1317/23/11/117002

start page

• 117002

end page

• 117002

volume

• 23

issue

• 11